JPS6370296U - - Google Patents
Info
- Publication number
- JPS6370296U JPS6370296U JP1986164159U JP16415986U JPS6370296U JP S6370296 U JPS6370296 U JP S6370296U JP 1986164159 U JP1986164159 U JP 1986164159U JP 16415986 U JP16415986 U JP 16415986U JP S6370296 U JPS6370296 U JP S6370296U
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive element
- supported
- laminated
- axial direction
- laminated electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986164159U JPH051992Y2 (en]) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986164159U JPH051992Y2 (en]) | 1986-10-23 | 1986-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370296U true JPS6370296U (en]) | 1988-05-11 |
| JPH051992Y2 JPH051992Y2 (en]) | 1993-01-19 |
Family
ID=31093019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986164159U Expired - Lifetime JPH051992Y2 (en]) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051992Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430481A (ja) * | 1990-05-28 | 1992-02-03 | Nec Corp | 圧電アクチュエータの駆動方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5449093A (en) * | 1977-09-26 | 1979-04-18 | Nec Corp | Piezoelectric actuator |
| JPS5972135A (ja) * | 1982-10-18 | 1984-04-24 | Hitachi Ltd | 超精密ｘｙ移動装置 |
| JPS6059981A (ja) * | 1983-09-09 | 1985-04-06 | Asahi Okuma Ind Co Ltd | 駆動装置 |
-
1986
- 1986-10-23 JP JP1986164159U patent/JPH051992Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5449093A (en) * | 1977-09-26 | 1979-04-18 | Nec Corp | Piezoelectric actuator |
| JPS5972135A (ja) * | 1982-10-18 | 1984-04-24 | Hitachi Ltd | 超精密ｘｙ移動装置 |
| JPS6059981A (ja) * | 1983-09-09 | 1985-04-06 | Asahi Okuma Ind Co Ltd | 駆動装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430481A (ja) * | 1990-05-28 | 1992-02-03 | Nec Corp | 圧電アクチュエータの駆動方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH051992Y2 (en]) | 1993-01-19 |